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Rapid thermal processing of silicon wafers with emissivity …
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Rapid thermal process - SemiStar Corp.
WebTherm-X Manufactures the Following Semiconductor Products. Therm-X designs and manufactures a complete line of heating solutions for semiconductor processing applications. These heating solutions are utilized at various stages of wafer processing. All product designs are pioneered by our highly talented product development team. WebThe process of rapidly heating wafers. Description Rapid thermal anneal (RTA), also called rapid thermal processing (RTP), is a semiconductor manufacturing process in which … WebRTP is a flexible technology that provides fast heating and cooling to process temperatures of ~200-1250°C with ramp rates typically 20-200°C/sec, combined with excellent gas ambient control, allowing the creation of sophisticated multistage processes within one processing recipe. chrome pdf 转 图片